Ion Implantation and Synthesis of Materials (Springer Series in Materials Science)

Ion Implantation and Synthesis of Materials (Springer Series in Materials Science)

by Michael Nastasi
  • List Price: $179.99
  • ISBN-10: 3540236740
  • ISBN-13: 9783540236740
  • Edition: 2006th
  • Type: Hardcover
  • Publisher: Springer

About The Book

Ion implantation is one of the key processing steps in silicon integrated circuit technology. Some integrated circuits require up to 17 implantation... Read more

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