are mesoscopic models, which reflect the transport and reaction of the gaseous species through a homogeneous media in the chamber. The models include the conservation of mass and the porous media in accordance with Darcy's law. The transport through the stationary and non-ionised plasma field is treated as a diffusion-dominated flow, where the metallic deposit and the gas chamber look like porous media. This book examines the theoretical results of decomposition methods, as well as presents the application to the CVD apparatus.

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