
Chemical-Mechanical Polishing 2000 - Fundamentals and Materials Issues: Volume 613 (MRS Proceedings)
- List Price: $40.99
- ISBN-10: 1558995218
- ISBN-13: 9781558995215
- Edition: 1st
- Type: Hardcover
- Publisher: Cambridge University Press
About The Book
Chemical-mechanical polishing (CMP) is a critical technology in the planarization of multilevel metallization systems and shallow-trench isolation in... Read more
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