Chemical-Mechanical Polishing 2000 - Fundamentals and Materials Issues: Volume 613 (MRS Proceedings)

Chemical-Mechanical Polishing 2000 - Fundamentals and Materials Issues: Volume 613 (MRS Proceedings)

  • List Price: $40.99
  • ISBN-10: 1558995218
  • ISBN-13: 9781558995215
  • Edition: 1st
  • Type: Hardcover
  • Publisher: Cambridge University Press

About The Book

Chemical-mechanical polishing (CMP) is a critical technology in the planarization of multilevel metallization systems and shallow-trench isolation in... Read more

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