
Chemical-Mechanical Polishing - Fundamentals and Challenges: Volume 566 (MRS Proceedings)
- List Price: $40.99
- ISBN-10: 1558994734
- ISBN-13: 9781558994737
- Edition: 1st
- Type: Hardcover
- Publisher: Cambridge University Press
About The Book
Chemical-mechanical planarization (CMP) has emerged over the past few years as a key enabling technology in the relentless drive of the semiconductor... Read more
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