
Plasma Etching: Fundamentals and Applications (Series on Semiconductor Science and Technology, 7)
by Sugawara, M.- List Price: $235.00
- ISBN-10: 019856287X
- ISBN-13: 9780198562870
- Edition: N/A
- Type: Hardcover
- Publisher: Oxford University Press
About The Book
This book focuses on the remarkable recent advances in understanding low pressure radio frequency glow discharges. It explains the basic analytical... Read more
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