Plasma Etching: Fundamentals and Applications (Series on Semiconductor Science and Technology)

Plasma Etching: Fundamentals and Applications (Series on Semiconductor Science and Technology)

by M. Sugawara
  • List Price: $235.00
  • ISBN-10: 019856287X
  • ISBN-13: 9780198562870
  • Edition: N/A
  • Type: Hardcover
  • Publisher: Oxford University Press

About The Book

This book focuses on the remarkable recent advances in understanding low pressure radio frequency glow discharges. It explains the basic analytical... Read more

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